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The diffusion equation is,

Ct=D2C .

In constant source diffusion, the concentration is held constant at the surface. The concentration of dopants is,

C(z,t)=C0erfc(z4Dt).

The concentration falls at the surface and the total number of dopants remains constant.

C

0.0
0.5
1.0
1.5
2.0
2.5
3.0
0.00
0.25
0.50
0.75
1.00

z