Physics of Semiconductor Devices

Return to
problem list


Depletion width in a MOS capacitor

In a silicon MOS capacitor, the silicon is doped p-type at Na = 5000000000000000 cm-3. Inversion occurs when the applied gate voltage is 2eφF. What is the depletion width at 300 K?

W = m

For Si: ni = 1.5 × 1010 cm³, εr = 11.9.