Semiconductor Laboratory

Books

Seminar

Photolithography

Direct-Write
Nanofabrication

μCT

Semiconductor
Devices

Electrochemistry

Instruments

Device
Simulations

Decapsulation

Computer
Supported
Measurements

Mathematical
Tools

      

Semiconductor Laboratory

The courses Research Laboratory Semiconductor Devices (PHT.311) and Laboratory Course Semiconductor Processing and Nanotechnology (MAS.301) both include 2 two-day laboratory exercises that involve semiconducting materials or devices. In addition, the Advanced Materials Science course includes a two-day overview of semiconductor processing technology.

Some of the exercises focus on the fabrication of semiconductor devices. This involves thin film deposition, lithography, and etching. In other exercises we will start with a packaged integrated circuit and take it apart to see what is inside.