Introduction to Microfabrication

This is a textbook on microfabrication. It is available as an e-book through the TU Graz library. TU Graz students can download the pdf files of the chapters of this book using an IP address of the TU. It is used in the course on Microelectronics and Micromechanics

MKS Handbook of Semiconductor Devices and Process Technology (pdf)

This handbook discusses many of the topics in this course.

International Roadmap for Devices and Systems

The IRDS is a set of predictions that serves as the successor to the ITRS. The intent is to provide a clear outline to simplify academic, manufacturing, supply, and research coordination regarding the development of electronic devices and systems.

IEEE Electronic Packaging Society - Heterogeneous Integration Roadmap

Describes the current trends in electronics packaging.
HIR Overview and executive summary - High Performance Computing and Data Centers - Internet of Things - Medical, Health and Wearables - Automotive - Aerospace and Defense - Mobile - Single Chip and Multi Chip Integration - Integrated Photonics - Integrated Power Electronics - MEMS - 5G - Co Design - Simulation - Materials - Emerging Devices - Test - Supply Chain - Security - Thermal - SIP and Module System Integration - Interconnects for 2D and 3D - Wafer Level Packaging

Low Level Measurements Handbook - 7th Edition - Tektronix

Physik der Halbleiterbauelemente

This book describes the basics of semiconductor device physics. It is available as an e-book from the TU Graz library.

BYU Cleanroom

A website about the Brigham Young University cleanroom with useful notes about cleanroom procedures.

Reinraumtechnik

Describes clean-room technologies. Available as an e-book from the TU-Graz library.

PV Lighthouse

PV Lighthouse maintains a website with useful calculators for quantities such as the resistivity or mobility of semiconductors.

Physics of Semiconductor Devices