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Lectures Summer Semester 2015
- Introduction / Properties of silicon - March 5, 2015: Slides
- Properties of silicon / Semiconductor devices- March 12, 2015: Slides
- Semiconductor devices / Lithography - March 19, 2015: Slides
- Lithography / Thin film growth - March 26, 2015: Slides
- Physical Vapor Deposition (PVD) - April 23, 2015: Slides
- Chemical Vapor Deposition (CVD) - April 30, 2015: Slides
- Etching - May 7, 2015: Slides
- Cleaning, Doping - May 21, 2015: Slides
- Oxidation, CMOS - May 28, 2015: Slides
- Oxidation, CMOS - May 28, 2015: Slides
- CMOS, memories - June 11, 2015: Slides
- Micromechanics - June 18, 2015: Slides
- Micromechanics, microoptics, microfluidics - June 25, 2015: Slides (no video)
- After miniaturization - July 2, 2015: Slides
Videos of the lectures are available at:
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