513.160 Microelectronics and Micromechanics

Home

Outline

Books

Lectures

Materials

Student projects

      

Lectures Summer Semester 2017

  • Introduction - March 9, 2017: Slides
  • Semiconducting materials and devices - March 16, 2017: Slides
  • Lithography - March 23, 2017: Slides
  • Thin film deposition - March 30, 2017: Slides
  • Etching, Cleaning - April 6, 2017: Slides
  • Doping, Oxidation - April 27, 2017: Slides
  • CMOS, memories - May 4, 2017: Slides
  • Micromechanics - May 11, 2017: Slides
  • Micromechanics - May 18, 2017: Slides
  • Micromechanics - June 22, 2017: Slides

Videos of the lectures are available at:

Summer Semester 2015